Bodermann, B.: search on Z-Library

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1

SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Mathematical model of a galvanometer-based scanner: simulations and experiments

Mnerie, Corina, Preitl, Stefan, Duma, Virgil-Florin, Bodermann, Bernd, Frenner, Karsten, Silver, Richard M.

Year:

2013

Language:

english

File:

PDF, 1016 KB

english, 2013

2

Optical dimensional metrology at Physikalisch-Technische Bundesanstalt (PTB) on deep sub-wavelength nanostructured surfaces

Bodermann, B, Ehret, G, Endres, J, Wurm, M

Journal:

Surface Topography: Metrology and Properties

Year:

2016

Language:

english

File:

PDF, 2.67 MB

english, 2016

3

SPIE Proceedings [SPIE European Mask and Lithography Conf 2007 - Grenoble, France (Monday 22 January 2007)] 23rd European Mask and Lithography Conference - Metrology capabilities and performance of the new DUV scatterometer of the PTB

Wurm, Matthias, Bodermann, Bernd, Pilarski, Frank

Year:

2007

Language:

english

File:

PDF, 774 KB

english, 2007

4

SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 13 June 2005)] Optical Measurement Systems for Industrial Inspection IV - Improved optical linewidth measurement by means of alternating dark field illumination and model-based evaluation

Ehret, Gerd, Bodermann, Bernd, Mirande, Werner, Osten, Wolfgang, Gorecki, Christophe, Novak, Erik L.

Year:

2005

Language:

english

File:

PDF, 1.85 MB

english, 2005

5

Using DNA origami nanorulers as traceable distance measurement standards and nanoscopic benchmark structures

Raab, Mario, Jusuk, Ija, Molle, Julia, Buhr, Egbert, Bodermann, Bernd, Bergmann, Detlef, Bosse, Harald, Tinnefeld, Philip

Journal:

Scientific Reports

Year:

2018

Language:

english

File:

PDF, 3.08 MB

english, 2018

6

Challenges in nanometrology: high precision measurement of position and size

Bosse, Harald, Bodermann, Bernd, Dai, Gaoliang, Flügge, Jens, Frase, Carl G., Groß, Hermann, Häßler-Grohne, Wolfgang, Köchert, Paul, Köning, Rainer, Scholze, Frank, Weichert, Christoph

Journal:

tm - Technisches Messen

Year:

2015

File:

PDF, 2.60 MB

2015

7

SPIE Proceedings [SPIE SPIE Scanning Microscopies - Monterey, California, United States (Tuesday 29 September 2015)] Scanning Microscopies 2015 - Photomask linewidth comparison by PTB and NIST

Postek, Michael T., Newbury, Dale E., Platek, S. Frank, Maugel, Tim K., Bergmann, D., Bodermann, B., Bosse, H., Buhr, E., Dai, G., Dixson, R., Häßler-Grohne, W., Hahm, K., Wurm, M.

Year:

2015

Language:

english

File:

PDF, 482 KB

english, 2015

8

SPIE Proceedings [SPIE SPIE Europe Optical Metrology - Munich, Germany (Monday 15 June 2009)] Modeling Aspects in Optical Metrology II - Angle-resolved optical metrology using multi-technique nested uncertainties

Silver, R. M., Barnes, B. M., Zhou, H., Zhang, N. F., Dixson, R., Bosse, Harald, Bodermann, Bernd, Silver, Richard M.

Year:

2009

Language:

english

File:

PDF, 2.20 MB

english, 2009

9

SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - EFPI signal processing method providing picometer-level resolution in cavity length measurement

Ushakov, Nikolai, Liokumovich, Leonid, Medvedev, Andrey, Bodermann, Bernd, Frenner, Karsten, Silver, Richard M.

Year:

2013

Language:

english

File:

PDF, 1.74 MB

english, 2013

10

SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, USA (Sunday 12 August 2012)] Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI - First steps towards a scatterometry reference standard

Bodermann, Bernd, Hansen, Poul-Erik, Burger, Sven, Henn, Mark-Alexander, Gross, Hermann, Bär, Markus, Scholze, Frank, Endres, Johannes, Wurm, Matthias, Postek, Michael T., Coleman, Victoria A., Orji,

Year:

2012

Language:

english

File:

PDF, 222 KB

english, 2012

11

SPIE Proceedings [SPIE SPIE Nanoscience + Engineering - San Diego, California, United States (Sunday 9 August 2015)] Nanoengineering: Fabrication, Properties, Optics, and Devices XII - Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing

Campo, Eva M., Dobisz, Elizabeth A., Eldada, Louay A., Agocs, Emil, Bodermann, Bernd, Burger, Sven, Dai, Gaoliang, Endres, Johannes, Hansen, Poul-Erik, Nielson, Lars, Madsen, Morten H., Heidenreich, S

Year:

2015

Language:

english

File:

PDF, 4.78 MB

english, 2015

12

SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Fundamental performance determining factors of the ultrahigh-precision space-borne optical metrology system for the LISA Pathfinder mission

Hechenblaikner, Gerald, Flatscher, Reinhold, Bodermann, Bernd, Frenner, Karsten, Silver, Richard M.

Year:

2013

Language:

english

File:

PDF, 666 KB

english, 2013

13

SPIE Proceedings [SPIE 30th European Mask and Lithography Conference - Dresden, Germany (Tuesday 24 June 2014)] 30th European Mask and Lithography Conference - Determination of line profiles on photomasks using DUV, EUV, and x-ray scattering

Behringer, Uwe F. W., Scholze, F., Bodermann, B., Burger, S., Endres, J., Haase, A., Krumrey, M., Laubis, C., Soltwisch, V., Ullrich, A., Wernecke, J.

Year:

2014

Language:

english

File:

PDF, 3.03 MB

english, 2014

14

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Modeling Aspects in Optical Metrology V - Correction of depolarization effect in Mueller matrix ellipsometry with polar decomposition method

Bodermann, Bernd, Frenner, Karsten, Silver, Richard M., Li, Weiqi, Zhang, Chuanwei, Jiang, Hao, Chen, Xiuguo, Gu, Honggang, Liu, Shiyuan

Year:

2015

Language:

english

File:

PDF, 757 KB

english, 2015

15

SPIE Proceedings [SPIE 22nd European Mask and Lithography Conference - Dresden, Germany (Monday 23 January 2006)] 22nd European Mask and Lithography Conference - Calibration of test masks used for lithography lens systems

Arnz, M., Häβler-Grohne, W., Bodermann, B., Bosse, H.

Year:

2006

Language:

english

File:

PDF, 536 KB

english, 2006

16

High precision description of the rovibronic structure of the I(mathsf{_2})B-X spectrum

H. Knöckel, B. Bodermann, E. Tiemann

Journal:

The European Physical Journal D / Atomic, Molecular, Optical and Plasma Physics

Year:

2004

Language:

english

File:

PDF, 550 KB

english, 2004

17

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Modeling Aspects in Optical Metrology III - Specification of optical surface accuracy using the structure function

Zhelem, Ross, Bodermann, Bernd

Year:

2011

Language:

english

File:

PDF, 1.08 MB

english, 2011

18

SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Modeling Aspects in Optical Metrology - The influence of target distance to lens distortion variation

Bräuer-Burchardt, Christian, Bosse, Harald, Bodermann, Bernd, Silver, Richard M.

Year:

2007

Language:

english

File:

PDF, 453 KB

english, 2007

19

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 25 June 2017)] Modeling Aspects in Optical Metrology VI - Phase retrieval with tunable phase transfer function based on the transport of intensity equation

Bodermann, Bernd, Frenner, Karsten, Silver, Richard M., Martinez-Carranza, J., Stepien, P., Kozacki, T.

Year:

2017

Language:

english

File:

PDF, 1.00 MB

english, 2017

20

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Modeling Aspects in Optical Metrology III - Deconvolution of non-zero solid angles effect in Bidirectional Scattering Distribution Function measurements

Ferrero, A., Bodermann, Bernd, Campos, J., Rabal, A. M., Pons, A., Hernanz, M. L., Corrons, A.

Year:

2011

Language:

english

File:

PDF, 235 KB

english, 2011

21

Inverted plasmonic lens design for nanometrology applications

KÃ¤seberg, T, Siefke, T, Kroker, S, Bodermann, B

Journal:

Measurement Science and Technology

Year:

2020

File:

PDF, 1.82 MB

2020

22

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Modeling Aspects in Optical Metrology V - Metrological characterization of a large aperture Fizeau for x-ray mirrors measurement

Bodermann, Bernd, Frenner, Karsten, Silver, Richard M., Vannoni, Maurizio, Freijo Martín, Idoia

Year:

2015

Language:

english

File:

PDF, 1.21 MB

english, 2015

23

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Modeling Aspects in Optical Metrology V - Transferring the Rb+ hyperfine-structure stability to a Fabry-Perot resonator used as a frequency standard for astronomical spectrographs

Bodermann, Bernd, Frenner, Karsten, Silver, Richard M., Huke, Philipp, Holzhüter, Hanno, Reiners, Ansgar

Year:

2015

Language:

english

File:

PDF, 738 KB

english, 2015

24

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Metrology, Inspection, and Process Control for Microlithography XXI - Aspects and new developments on edge angle and edge profile metrology at PTB

Bodermann, Bernd, Archie, Chas N., Buhr, Egbert, Diener, Alexander, Dirscherl, Kai, Ehret, Gerd, Frase, Carl Georg, Wurm, Matthias

Year:

2007

Language:

english

File:

PDF, 1.20 MB

english, 2007

25

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Modeling Aspects in Optical Metrology III - The off-axis alignment of an asphere by a Fizeau interferometer

Liang, Chao-Wen, Bodermann, Bernd, Chen, Yan-An, Lee, Cheng-Chung

Year:

2011

Language:

english

File:

PDF, 321 KB

english, 2011

26

Optical metrology for precision engineering

Gao, Wei, Bodermann, Bernd

Journal:

Advanced Optical Technologies

Year:

2014

Language:

german

File:

PDF, 10.37 MB

german, 2014

27

SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Modeling Aspects in Optical Metrology - Scattering at silver-enhanced gold particles inside subwavelength-apertured metallic layers

Glaser, Tilman, Bosse, Harald, Bodermann, Bernd, Silver, Richard M.

Year:

2007

Language:

english

File:

PDF, 966 KB

english, 2007

28

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 25 June 2017)] Modeling Aspects in Optical Metrology VI - A phase field study of stress effects on microstructure formation during laser-aided direct metal deposition process

Bodermann, Bernd, Frenner, Karsten, Silver, Richard M., Mirzade, Fikret K.

Year:

2017

Language:

english

File:

PDF, 305 KB

english, 2017

29

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Modeling Aspects in Optical Metrology V - Application of the ARMA model in distributed fiber vibration sensing system

Bodermann, Bernd, Frenner, Karsten, Silver, Richard M., Wu, Hongyan, Xu, Haiyan, Peng, HeKuo

Year:

2015

Language:

english

File:

PDF, 212 KB

english, 2015

30

SPIE Proceedings [SPIE SPIE Photomask Technology - Monterey, CA (Monday 14 September 2009)] Photomask Technology 2009 - Results of an international photomask linewidth comparison of NIST and PTB

Bodermann, B., Zurbrick, Larry S., Montgomery, M. Warren, Bergmann, D., Buhr, E., Hässler-Grohne, W., Bosse, H., Potzick, J., Dixson, R., Quintanilha, R., Stocker, M., Vladar, A., Orji, N. G.

Year:

2009

Language:

english

File:

PDF, 1.38 MB

english, 2009

31

A new flexible scatterometer for critical dimension metrology

Wurm, Matthias, Pilarski, Frank, Bodermann, Bernd

Journal:

Review of Scientific Instruments

Year:

2010

Language:

english

File:

PDF, 825 KB

english, 2010

32

SPIE Proceedings [SPIE 27th European Mask and Lithography Conference - Dresden, Germany (Tuesday 18 January 2011)] 27th European Mask and Lithography Conference - First steps towards traceability in scatterometry

Scholze, Frank, Behringer, Uwe F.W., Bodermann, Bernd, Groß, Hermann, Kato, Akiko, Wurm, Matthias

Year:

2011

Language:

english

File:

PDF, 1.33 MB

english, 2011

33

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Modeling Aspects in Optical Metrology V - In-line digital holography with double knife edge

Bodermann, Bernd, Frenner, Karsten, Silver, Richard M., Ramirez, Claudio, Iemmi, Claudio, Campos, Juan

Year:

2015

Language:

english

File:

PDF, 3.95 MB

english, 2015

34

Direct modeling of external quantum efficiency of silicon trap detectors

T. Menegotto, M. S. Lima, G. B. Almeida, I. B. Couceiro, H. P. Grieneisen, B. Bodermann

Language:

english

File:

PDF, 281 KB

english

35

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Modeling Aspects in Optical Metrology III - Depth sensitive Fourier-Scatterometry for the characterization of sub-100 nm periodic structures

Ferreras Paz, V., Peterhänsel, S., Frenner, Ka., Osten, W., Ovsianikov, A., Obata, K., Chichkov, B., Bodermann, Bernd

Year:

2011

Language:

english

File:

PDF, 3.59 MB

english, 2011

36

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Modeling Aspects in Optical Metrology V - Effect of wavefront aberrations on a focused plenoptic imaging system: a wave optics simulation approach

Bodermann, Bernd, Frenner, Karsten, Silver, Richard M., Turola, Massimo, Meah, Chris J., Marshall, Richard J., Styles, Iain B., Gruppetta, Stephen

Year:

2015

Language:

english

File:

PDF, 927 KB

english, 2015

37

SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Modeling Aspects in Optical Metrology - Multiple multipole program analysis of metallic optical waveguides

Hafner, Christian, Cui, Xudong, Bertolace, Andre, Vahldieck, Rüdiger, Bosse, Harald, Bodermann, Bernd, Silver, Richard M.

Year:

2007

Language:

english

File:

PDF, 421 KB

english, 2007

38

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Modeling Aspects in Optical Metrology V - A cascaded plasmonic superlens for near field imaging with magnification

Bodermann, Bernd, Frenner, Karsten, Silver, Richard M., Fu, Liwei, Schau, Philipp, Frenner, Karsten, Osten, Wolfgang

Year:

2015

Language:

english

File:

PDF, 698 KB

english, 2015

39

SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Modelling laser interferometers for the measurement of the Avogadro constant

Andreas, Birk, Mana, Giovanni, Massa, Enrico, Palmisano, Carlo, Bodermann, Bernd, Frenner, Karsten, Silver, Richard M.

Year:

2013

Language:

english

File:

PDF, 471 KB

english, 2013

40

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Modeling Aspects in Optical Metrology V - Simulation and analysis of lightweight space mirror design

Bodermann, Bernd, Frenner, Karsten, Silver, Richard M., Abdula, Polina A., Neutov, Mikhail Y., Tolstoba, Nadezhda D.

Year:

2015

Language:

english

File:

PDF, 833 KB

english, 2015

41

A scatterometry inverse problem in optical mask metrology

Model, R, Rathsfeld, A, Gross, H, Wurm, M, Bodermann, B

Journal:

Journal of Physics Conference Series

Year:

2008

Language:

english

File:

PDF, 818 KB

english, 2008

42

SPIE Proceedings [SPIE SPIE Europe Optical Metrology - Munich, Germany (Monday 15 June 2009)] Modeling Aspects in Optical Metrology II - Temperature sensitivity of TE double-negative metamaterial optical sensor

El-Khozondar, Hala J., Bosse, Harald, Bodermann, Bernd, Müller, Mathias, El-Khozondar, Rifa J., Silver, Richard M., Shabat, Mohammed M., Koch, Alexander W.

Year:

2009

Language:

english

File:

PDF, 203 KB

english, 2009

43

SPIE Proceedings [SPIE Photomask Technology 2005 - Monterey, California (Monday 3 October 2005)] 25th Annual BACUS Symposium on Photomask Technology - Calibration procedures and application of the PTB photomask CD standard

Häßler-Grohne, W., Weed, J. Tracy, Martin, Patrick M., Frase, C.G., Czerkas, S., Dirscherl, K., Bodermann, B., Mirandé, W., Ehret, G., Bosse, H.

Year:

2005

Language:

english

File:

PDF, 1.04 MB

english, 2005

44

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Modeling Aspects in Optical Metrology III - Front Matter: Volume 8083

SPIE, Proceedings of, Bodermann, Bernd

Year:

2011

Language:

english

File:

PDF, 380 KB

english, 2011

45

SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - The influence of nonlinear modal propagation analysis on MMI power splitters for miniaturization

Tajaldini, M., Mat Jafri, M. Z., Bodermann, Bernd, Frenner, Karsten, Silver, Richard M.

Year:

2013

Language:

english

File:

PDF, 362 KB

english, 2013

46

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Modeling Aspects in Optical Metrology III - Gradient reconstruction for the phase recovery from a single interferogram with closed fringes

Muñoz-Maciel, Jesús, Bodermann, Bernd, Casillas Rodriguez, Francisco J., Mora González, Miguel, Peña Lecona, Francisco G., Durán Ramírez, Victor M.

Year:

2011

Language:

english

File:

PDF, 827 KB

english, 2011

47

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 25 June 2017)] Modeling Aspects in Optical Metrology VI - Theoretical investigation on multilayer nanocomposite-based fiber optic SPR sensor

Bodermann, Bernd, Frenner, Karsten, Silver, Richard M., Shojaie, Ehsan, Madanipour, Khosro, Gharibzadeh, Azadeh, Abbasi, Shabnam

Year:

2017

Language:

english

File:

PDF, 413 KB

english, 2017

48

SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Multi resonant platform based on modified metallic nanoparticles for biological tissue characterization

Iovine, Renato, La Spada, L., Tarparelli, R., Vegni, L., Bodermann, Bernd, Frenner, Karsten, Silver, Richard M.

Year:

2013

Language:

english

File:

PDF, 453 KB

english, 2013

49

SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Efficient and stable numerical method for evaluation of Zernike polynomials and their Cartesian derivatives

Novák, Pavel, Novák, Jíří, Bodermann, Bernd, Frenner, Karsten, Silver, Richard M.

Year:

2013

Language:

english

File:

PDF, 418 KB

english, 2013

50

SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Modeling Aspects in Optical Metrology - Computer and experimental modeling of light scattering at random and fractal surfaces

Angelsky, Oleg V., Maksimyak, Alexander P., Maksimyak, Peter P., Bosse, Harald, Bodermann, Bernd, Silver, Richard M.

Year:

2007

Language:

english

File:

PDF, 644 KB

english, 2007

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